Company Filing History:
Years Active: 2015-2017
Title: Yansung Kim: Innovator in Plasma Processing Technology
Introduction
Yansung Kim is a notable inventor based in Monte Sereno, California. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of plasma chambers used in various applications.
Latest Patents
One of Yansung Kim's latest patents is titled "Edge exclusion control with adjustable plasma exclusion zone ring." This patent describes systems and methods for edge exclusion control within a plasma processing chamber. The system includes a lower electrode that supports a substrate and is coupled with a radio frequency (RF) power supply. An upper electrode is positioned over the lower electrode and is electrically grounded. The chamber also features an upper dielectric ring that surrounds the upper electrode, which can be adjusted vertically independent of the upper electrode's position. Additionally, the system includes upper and lower electrode extensions that are also grounded, enhancing the control over the plasma exclusion zone.
Career Highlights
Yansung Kim is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop innovative solutions that improve plasma processing techniques, contributing to advancements in semiconductor manufacturing.
Collaborations
Yansung Kim collaborates with Keechan Kim, a fellow innovator in the field. Their partnership has fostered a creative environment that encourages the development of cutting-edge technologies in plasma processing.
Conclusion
Yansung Kim's contributions to plasma processing technology through his patents and work at Lam Research Corporation highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of semiconductor manufacturing.