Company Filing History:
Years Active: 2019
Title: Yan Sun - Innovator in Nano-Defect Inspection Technology
Introduction
Yan Sun is a prominent inventor based in Fremont, CA (US). He has made significant contributions to the field of substrate inspection technology. His innovative approach has led to the development of a unique method for detecting nano-defects on substrates.
Latest Patents
Yan Sun holds a patent for a "Dark field wafer nano-defect inspection system with a singular beam." This invention provides a method, system, and apparatus for inspecting a substrate. The method involves illuminating the substrate with a singular laser beam, which forms an illuminated spot and a bright fringe at the surface of the substrate. The bright fringe extends over at least a portion of the illuminated spot, allowing for the detection of scattered light from nano-defects present within the illuminated area.
Career Highlights
Yan Sun is currently employed at Tokyo Electron Limited, where he continues to advance his research and development efforts. His work focuses on enhancing the capabilities of inspection systems to ensure high-quality substrates in various applications.
Collaborations
Some of Yan Sun's notable coworkers include Xinkang Tian and Ching-Ling Meng, who contribute to the collaborative efforts in their projects.
Conclusion
Yan Sun's innovative work in nano-defect inspection technology exemplifies the importance of advancements in substrate quality assurance. His contributions are paving the way for future developments in the field.
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