Xugang Xiong

Title: The Innovations of Xugang Xiong

Introduction

Xugang Xiong is an accomplished inventor based in Wilton, CT, USA. He holds a patent that showcases his expertise in the field of lithography. His work contributes significantly to advancements in device manufacturing methods.

Latest Patents

Xiong's notable patent is titled "Lithographic apparatus and device manufacturing method." This invention involves an apparatus and a method designed to hold a patterning device that imparts a beam of radiation with a specific pattern in its cross-section. The apparatus features a base that supports the patterning device and an inner cover that can be coupled to the base. The inner cover includes a restraining mechanism that applies an in-plane force to the patterning device, ensuring its stability during operation.

Career Highlights

Xugang Xiong is associated with ASML Holding N.V., a leading company in the semiconductor industry. His role at ASML allows him to work on cutting-edge technologies that drive innovation in lithography and device manufacturing.

Collaborations

Xiong collaborates with notable colleagues, including Robert Gabriël Maria Lansbergen and Peter Conrad Kochersperger. Their combined expertise fosters a productive environment for innovation and development.

Conclusion

Xugang Xiong's contributions to lithography and device manufacturing highlight his role as a significant inventor in the field. His patent reflects a commitment to advancing technology and improving manufacturing processes.