Xinyi Lu

Title: Xinyi Lu: Innovator in Advanced Technology Processes

Introduction

Xinyi Lu is a prominent inventor based in Santa Clara, California. He has made significant contributions to the field of semiconductor technology, particularly in the area of low-k film processing. His innovative work has led to the development of advanced methods that enhance the performance of electronic devices.

Latest Patents

Xinyi Lu holds a patent for an "Integrated low k recovery and ALD metal deposition process for advanced technology node." This patent describes a method that involves positioning a substrate within a processing chamber. The substrate features a first low-k film with a specific water contact angle, which is placed over an interconnect structure. The process includes cleaning the substrate to create a cleaned substrate, which then undergoes exposure to a recovery precursor, resulting in a recovered substrate. This substrate is treated with UV light to form a treated substrate, which ultimately has a treated low-k film with a different water contact angle. The final step involves depositing a liner layer over the treated substrate using atomic layer deposition (ALD). This innovative approach is crucial for improving the efficiency and reliability of semiconductor devices.

Career Highlights

Xinyi Lu is currently employed at Applied Materials, Inc., a leading company in the semiconductor manufacturing equipment industry. His work at Applied Materials has positioned him as a key player in advancing technology nodes, which are essential for the development of next-generation electronic devices.

Collaborations

Xinyi Lu collaborates with talented professionals in his field, including Shinjae Kwon and Fredrick Kim. These collaborations enhance the innovation process and contribute to the successful development of new technologies.

Conclusion

Xinyi Lu's contributions to semiconductor technology through his innovative patent and work at Applied Materials, Inc. highlight his role as a significant inventor in the industry. His advancements in low-k film processing are paving the way for future innovations in electronic devices.