This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2002.
Company Filing History:
Years Active: 2002
Title: Innovations by Xin Shen Guo
Introduction
Xin Shen Guo is a notable inventor based in Los Altos Hills, California. She has made significant contributions to the field of substrate processing systems. Her innovative work has led to the development of a patented method and apparatus that enhances the control of process and purge material in chemical vapor deposition systems.
Latest Patents
Xin Shen Guo holds a patent for a "Method and apparatus for improved control of process and purge material in a substrate processing system." This patent describes a deposition system that includes a deposition chamber with a lid and a vaporizer attached to it. The system features valves that regulate the flow of precursor material to the chamber, improving the purging process of the precursor material delivery system. The flexible conduction line, designed as a multiple turn coil, allows for easy detachment of the lid without damaging the conduction line. This innovative design utilizes materials such as stainless steel tubing and fluorocarbon compounds, ensuring efficiency and reliability in substrate processing.
Career Highlights
Xin Shen Guo is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. Her work at Applied Materials has positioned her as a key player in advancing technologies related to chemical vapor deposition. With her expertise, she has contributed to the development of systems that enhance manufacturing processes in the semiconductor sector.
Collaborations
Throughout her career, Xin has collaborated with esteemed colleagues, including John Vincent Schmitt and Frank P. Chang. These collaborations have fostered an environment of innovation and have led to the successful development of advanced technologies in substrate processing.
Conclusion
Xin Shen Guo's contributions to the field of substrate processing systems exemplify her innovative spirit and dedication to advancing technology. Her patent and work at Applied Materials, Inc. highlight her role as a significant inventor in the industry.