Xiaozhong Wu

Title: Innovations of Xiaozhong Wu in MEMS Technology

Introduction

Xiaozhong Wu is a notable inventor based in San Jose, California, recognized for his contributions to the field of Micro Electro Mechanical Systems (MEMS). With a total of two patents to his name, he has made significant advancements in the measurement of gas and liquid flow speeds.

Latest Patents

Wu's latest patents include a MEMS time-of-flight thermal mass flow meter. This innovative apparatus features a micromachined silicon flow sensor, a flow channel package, and driving circuitry. It operates on the principle of thermal time-of-flight (TOF) to accurately measure flow speed. The micromachining technique employed in this invention allows for reduced fabrication costs through batch production. Additionally, this microfabrication process offers advantages such as small feature size, low power consumption, and high accuracy compared to traditional manufacturing methods. The technology is capable of providing precise flow speed measurements for gases, irrespective of their compositions.

Another significant patent by Wu is the configuration and methods for manufacturing a time-of-flight MEMS mass flow sensor. This invention presents a self-calibrated mass flow sensor that measures flow velocity directly. The self-calibration is achieved by applying an electric pulse to a heater within the flow, allowing for the determination of temperature variations in the fluid. The method includes measuring temperature variations with a sensor positioned near the heater and correlating these variations to ascertain flow velocity.

Career Highlights

Xiaozhong Wu is currently employed at Siargo Ltd., where he continues to innovate in the MEMS field. His work has contributed to the development of advanced flow measurement technologies that enhance accuracy and efficiency.

Collaborations

Wu collaborates with talented individuals such as Liji Huang and Yahong Yao, who contribute to his research and development efforts.

Conclusion

Xiaozhong Wu's innovative work in MEMS technology, particularly in flow measurement, showcases his expertise and commitment to advancing this field. His patents reflect a significant leap forward in the accuracy and efficiency of flow sensors.