Xiaoshu Chen

Title: Innovations of Xiaoshu Chen in Semiconductor Technology

Introduction

Xiaoshu Chen is a notable inventor based in Fremont, CA, who has made significant contributions to the field of semiconductor technology. His work primarily focuses on characterizing high aspect ratio structures, which are crucial in the fabrication of advanced semiconductor devices. With a patent portfolio that includes innovative methods and apparatus, Chen has established himself as a key figure in this specialized area.

Latest Patents

One of Xiaoshu Chen's most significant patents is titled "Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering." This patent presents methods for characterizing high aspect ratio (HAR) structures in semiconductor devices. The techniques involve using small angle X-ray scattering (SAXS) to analyze the average parameters of HAR structures. The patent also introduces tilted structural symmetry analysis-SAXS (TSSA-SAXS), which allows for the examination of parameters such as tilt, sidewall angle, and bowing in HAR structures.

Career Highlights

Throughout his career, Xiaoshu Chen has worked with prominent organizations, including Lam Research Corporation and the Government of the United States of America, as represented by the Secretary of Commerce. His experience in these institutions has allowed him to develop and refine his innovative techniques in semiconductor technology.

Collaborations

Xiaoshu Chen has collaborated with esteemed colleagues such as William Dean Thompson and Regis Joseph Kline. These partnerships have contributed to the advancement of his research and the successful implementation of his patented technologies.

Conclusion

Xiaoshu Chen's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence the development of advanced semiconductor devices, showcasing the impact of his inventions on the industry.