Company Filing History:
Years Active: 2021
Title: Innovator Xiaofang Gu: Advancing Wafer Surface Detection in Shanghai
Introduction: Xiaofang Gu is a prominent inventor based in Shanghai, China, known for her groundbreaking contributions to the field of semiconductor technology. With a focus on defects in wafer surfaces, she has developed an innovative method that enhances the detection of ultra-small defects that can significantly impact semiconductor performance and quality.
Latest Patents: Xiaofang Gu holds a patent for a method titled "Method for detecting ultra-small defect on wafer surface." The invention presents a novel approach for identifying ultra-small defects on a wafer surface, which can lead to abnormalities in the film layer. The method involves forming a photoresist pattern with a defect, etching the film layer according to this pattern, and subsequently scanning the pattern with a defect scanner to capture enlarged defects. This innovative technique employs exposure defocusing principles and the integration of photomasks to significantly improve detection capabilities of conventional methods, allowing for the identification of defects that were previously undetectable.
Career Highlights: Currently, Xiaofang Gu is associated with Shanghai Huali Microelectronics Corporation, a leader in microelectronics. Her expertise in semiconductor fabrication and defect detection underscores her significant role in advancing technology within the industry.
Collaborations: In her research endeavors, Xiaofang collaborates with distinguished colleagues, including Xianghua Hu and Gaoyu Wang. These partnerships exemplify a collective dedication to pushing the boundaries of innovation in semiconductor technology.
Conclusion: Xiaofang Gu's contributions to the detection of ultra-small defects on wafer surfaces showcase her dedication to innovation and excellence in the semiconductor field. As she continues her work at Shanghai Huali Microelectronics Corporation, her inventions are set to enhance the quality and reliability of semiconductor manufacturing processes, contributing to the ever-evolving technology landscape.