Xiao-An Fu

Title: Innovations of Inventor Xiao-An Fu

Introduction

Xiao-An Fu is a notable inventor based in Mayfield Village, OH (US). He has made significant contributions to the field of materials science, particularly in the development of ceramic films. With a total of 3 patents to his name, Fu's work has implications for various advanced technologies.

Latest Patents

One of his latest patents is titled "Composition comprising silicon carbide." This patent discloses a method of depositing a ceramic film, specifically a silicon carbide film, on a substrate. The method focuses on controlling the residual stress, residual stress gradient, and resistivity of the film. Additionally, it describes substrates that have a deposited film with these controlled properties, which are particularly useful for MEMS and NEMS devices. Another patent by Fu, "Silicon carbide and other films and method of deposition," shares similar themes, emphasizing the importance of controlling the properties of ceramic films for advanced applications.

Career Highlights

Xiao-An Fu has worked with prestigious institutions, including Case Western Reserve University and Flx Micro, Inc. His experience in these organizations has allowed him to refine his expertise in materials science and engineering.

Collaborations

Fu has collaborated with notable colleagues in his field, including Mehran Mehregany and Christian A. Zorman. These collaborations have contributed to the advancement of research and innovation in ceramic film technologies.

Conclusion

Xiao-An Fu's innovative work in the field of ceramic films and his contributions to advanced technologies highlight his importance as an inventor. His patents reflect a commitment to enhancing the properties of materials for various applications.