Location History:
- Johor Bahru, MY (2001)
- Johor, MY (2000 - 2002)
Company Filing History:
2 out of 815 
1 out of 1 
1 out of 80 
Years Active: 2000-2002
Title: Wye Boon Loh: Innovator in Semiconductor Technology
Introduction
Wye Boon Loh is a notable inventor based in Johor, Malaysia. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the performance and reliability of semiconductor devices.
Latest Patents
Wye Boon Loh's latest patents include innovative methods for the passivation of copper interconnect surfaces. One of his patents describes a process where an interconnect line is formed in an interconnect hole on an intermetal dielectric (IMD) layer. This involves creating a diffusion barrier on the walls and bottom of the hole, filling it with a copper metal line, and then performing a chemical mechanical polishing (CMP) step to planarize the device. A passivating metal layer is subsequently deposited on the surface of the copper metal line, encapsulating it at the top of the hole. Another patent outlines a simplified dual damascene process utilizing Plasma Polymerized Methylsilane Oxide (PPMSO) as an insulator layer. This method employs a single photo mask to define the metal trench and via region, followed by a two-step reactive ion etching (RIE) plasma treatment to remove excess materials and deposit conductive metal.
Career Highlights
Throughout his career, Wye Boon Loh has worked with various companies, including Chartered Semiconductor Manufacturing Ltd. His experience in the semiconductor industry has allowed him to develop innovative solutions that address critical challenges in device fabrication.
Collaborations
Wye Boon Loh has collaborated with notable colleagues such as Lap Chan and Kuan Pei Yap. These partnerships have contributed to the advancement of semiconductor technologies and the successful development of his patented processes.
Conclusion
Wye Boon Loh's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His innovative approaches continue to shape the future of semiconductor device manufacturing.