Seattle, WA, United States of America

Worm Lund


Average Co-Inventor Count = 5.0

ph-index = 1

Forward Citations = 30(Granted Patents)


Company Filing History:


Years Active: 1991

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1 patent (USPTO):Explore Patents

Title: The Innovations of Worm Lund

Introduction

Worm Lund is a notable inventor based in Seattle, WA (US), recognized for his contributions to the field of semiconductor processing. With a focus on enhancing the efficiency and effectiveness of thermal processing, Lund has made significant strides in technology.

Latest Patents

Lund holds a patent for a "Vertical thermal processor for semiconductor wafers." This innovative device features a vertical process chamber where semiconductor wafers are positioned within a supporting vertical wafer tower. The design includes a lower gate valve that is fixed to a supporting framework, allowing for the wafers to undergo pre-treatment and post-treatment processes. The system utilizes two load locks that work in conjunction with the process chamber and a wafer loading station. Additionally, a cleaning element is movably mounted on the framework to maintain the interior surfaces of the process tube within the process chamber.

Career Highlights

Worm Lund has built a career centered around semiconductor technology, working at Semitherm, a company dedicated to advancing thermal processing solutions. His expertise in this area has led to the development of innovative technologies that improve the manufacturing processes of semiconductor devices.

Collaborations

Lund has collaborated with notable colleagues, including Donald W. Heidt and Steve Thompson, who have contributed to his work in the semiconductor field. Their combined efforts have fostered advancements in thermal processing technologies.

Conclusion

Worm Lund's contributions to semiconductor processing through his innovative patent demonstrate his commitment to advancing technology in this critical field. His work continues to influence the industry and pave the way for future innovations.

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