Woorim Lee

Title: Woorim Lee: Innovator in Semiconductor Manufacturing

Introduction

Woorim Lee is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent.

Latest Patents

Woorim Lee holds a patent for a "Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devices." This patent outlines a manufacturing method that includes depositing a chamber protective layer in a chamber, supplying a first purge gas to the chamber, and transferring a substrate to the chamber. The substrate is disposed inside an edge ring on an electrostatic chuck. The process involves several steps, including processing the substrate, supplying a second purge gas, and removing the chamber protective layer. The method ensures minimal variation of the surface roughness of the edge ring, with a specific ratio of gas flow rates during the substrate processing.

Career Highlights

Woorim Lee is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in semiconductor technology. His work has been instrumental in enhancing manufacturing processes and improving product quality.

Collaborations

Woorim Lee has collaborated with notable coworkers, including Sunggil Kang and Inseong Kim, contributing to advancements in their field.

Conclusion

Woorim Lee's contributions to semiconductor manufacturing through his innovative patent demonstrate his expertise and commitment to advancing technology. His work at Samsung Electronics Co., Ltd. continues to influence the industry positively.