Won Yong Koh

Title: Innovations by Won Yong Koh

Introduction

Won Yong Koh is a notable inventor based in Taejon, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in the development of methods for forming interconnections and thin films. With a total of 2 patents, his work has advanced the capabilities of electronic devices.

Latest Patents

One of his latest patents is a method of forming copper interconnections and thin films using chemical vapor deposition with a catalyst. This innovative method allows for the formation of copper conductors that interconnect active and passive elements, as well as signal and power lines on silicon wafers. The process utilizes catalysts in conjunction with chemical vapor deposition (CVD) to create interconnecting conductors efficiently. Additionally, it includes methods for filling trenches, via holes, and contacts, which are essential for power devices and lines. Another significant patent involves a method for forming a three-component nitride film containing metal, silicon, and nitrogen for use in semiconductor devices. This method ensures a uniform thickness of the nitride film, even on uneven semiconductor substrate surfaces.

Career Highlights

Throughout his career, Won Yong Koh has worked with companies such as Genitech, Inc. and Genitech Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.

Collaborations

He has collaborated with notable coworkers, including Hyung Sang Park and Ji Hwa Lee, who have also contributed to advancements in the field.

Conclusion

Won Yong Koh's innovative methods and patents have significantly impacted the semiconductor industry, showcasing his expertise and dedication to advancing technology. His contributions continue to influence the development of electronic devices and materials.