This inventor holds 1 USPTO granted patent. Top assignee: International Business Machines Corporation. Active years: 1984.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 1984
Title: Wolfgang Augstein and His Polysilicon Etching Invention
Introduction
Wolfgang Augstein is an inventor associated with Holzgerlingen, Germany, and International Business Machines Corporation. His patent work addresses a method for controlling the edge angles of openings etched in a polysilicon layer.
Latest Patents
Augstein is associated with 1 patent: “Method of Adjusting the Edge Angle in Polysilicon.” The invention describes pretreating a polysilicon layer before forming a photoresist mask. The treatment uses a mixture of five parts water, one to three parts ammonia, and 0.25 to one part hydrogen peroxide. It is advantageously performed at a temperature between 40°C and 70°C, allowing the steepness of the etched opening’s edge angles to be adjusted.
Career Highlights
Augstein’s listed patent is connected with International Business Machines Corporation, commonly known as IBM. It focuses on process control in polysilicon etching, a technique relevant to semiconductor fabrication.
Collaborations
His listed coworkers include Peter U. Frasch and Blanka Ivancic.
Conclusion
Wolfgang Augstein’s patent documents a chemical pretreatment method for adjusting edge angles in etched polysilicon, reflecting his contribution to semiconductor process technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile