This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Vlsi Technology, Inc.. Active years: 1995-1996.
Company Filing History:
Years Active: 1995-1996
Title: The Innovations of William P. Marsh
Introduction
William P. Marsh is a notable inventor based in San Antonio, TX (US). He has made significant contributions to the field of semiconductor processing, holding a total of 2 patents. His work focuses on improving plasma processing systems, which are essential in the manufacturing of semiconductor devices.
Latest Patents
Marsh's latest patents include a method of processing a semiconductor wafer and a plasma processing apparatus. The method involves an improved fluid distribution head characterized by a non-planar dispersion plate with multiple apertures. This design allows for effective gas flow during the plasma processing of semiconductor wafers. The non-planar dispersion plate features a concave, spherical portion with a radius of curvature of at least four feet. The mechanism for gas flow includes an enclosure that communicates with the dispersion plate, ensuring efficient processing of the wafer.
Career Highlights
William P. Marsh is associated with VLSI Technology, Inc., where he has contributed to advancements in semiconductor technology. His innovative designs have played a crucial role in enhancing the efficiency and effectiveness of plasma processing systems.
Collaborations
Marsh has worked alongside notable colleagues, including Michael E. Costabile and Michael P. Relue. Their collaborative efforts have furthered the development of cutting-edge technologies in the semiconductor industry.
Conclusion
William P. Marsh's contributions to semiconductor processing through his patents and work at VLSI Technology, Inc. highlight his importance as an inventor in this field. His innovative approaches continue to influence the industry and pave the way for future advancements.