Company Filing History:
Years Active: 2025
Title: William Mcgahan: Innovator in X-ray Scatterometry
Introduction
William Mcgahan is a notable inventor based in Spicewood, TX (US). He has made significant contributions to the field of semiconductor measurements through his innovative patent. His work focuses on enhancing the efficiency of X-ray scatterometry measurements, which are crucial for analyzing semiconductor structures.
Latest Patents
William Mcgahan holds a patent titled "Forward library based seeding for efficient X-ray scatterometry measurements." This patent describes methods and systems for performing X-ray model-based scatterometry measurements of semiconductor structures with reduced computational effort. The process involves transforming measured detector image data into diffraction order efficiency data. This data is then compared with a parameter-efficiency library that includes simulated diffraction order efficiency data and associated sets of specimen parameter values. By selecting one or more sets of specimen parameter values as seed values for regression, the method enables accurate X-ray scatterometry measurements with significantly less computational effort. This innovation allows for the convergence of image-based regression to the global minimum with a dramatically reduced number of iterations.
Career Highlights
William Mcgahan is currently employed at Kla Corporation, where he applies his expertise in semiconductor technology. His work has been instrumental in advancing the methodologies used in X-ray scatterometry, making it more efficient and effective for industry applications.
Collaborations
Throughout his career, William has collaborated with talented individuals such as Rebecca Shen and Naga Venkata Lakshmi Sandeep Inampudi. These collaborations have further enriched his work and contributed to the development of innovative solutions in the field.
Conclusion
William Mcgahan is a distinguished inventor whose contributions to X-ray scatterometry have significantly impacted semiconductor measurements. His innovative approaches continue to enhance the efficiency of this critical technology.