Company Filing History:
1 out of 13,771 
1 out of 833,002 Years Active: 1996-2012
Title: Wesley George Lau: Innovator in Semiconductor Processing
Introduction
Wesley George Lau is a notable inventor based in San Jose, California. He has made significant contributions to the field of semiconductor processing, holding a total of 2 patents. His innovative approaches have advanced the techniques used in cleaning and passivating semiconductor substrates.
Latest Patents
Lau's latest patents include a method for cleaning process residues from substrate processing chamber components. This invention involves removing a component from a substrate processing chamber and transferring it to a cleaning chamber. The component is then exposed to an energized cleaning gas, which effectively cleans both the internal and external surfaces of the component. Notably, this cleaning gas can also repair surface defects in the component.
Another significant patent by Lau focuses on the passivation, stripping, and corrosion inhibition of semiconductor substrates. This process involves placing an etched substrate into a vacuum chamber and subjecting it to a multicycle passivation process. Each cycle includes a passivating step, where passivating gas is introduced, and a stripping step, where a stripping gas is used to remove any remnant resist. This innovative approach enhances the durability and performance of semiconductor devices.
Career Highlights
Wesley George Lau has worked with prominent companies in the semiconductor industry, including Applied Materials, Inc. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor processing.
Collaborations
Throughout his career, Lau has collaborated with esteemed colleagues such as Jian J Chen and James S Papanu. These collaborations have contributed to the advancement of technologies in the semiconductor field.
Conclusion
Wesley George Lau's contributions to semiconductor processing through his patents and career achievements highlight his role as an influential inventor. His innovative methods continue to impact the industry positively.