Weon-sik Paek

Title: Weon-sik Paek: Innovator in Semiconductor Technology

Introduction

Weon-sik Paek is a notable inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in the formation of field oxide layers in integrated circuits. His innovative methods have implications for the efficiency and reliability of semiconductor devices.

Latest Patents

Weon-sik Paek holds 1 patent for his invention titled "Method for forming a field oxide layer of a semiconductor integrated." This patent describes a method that involves several steps, including the deposition of a pad oxide layer and a nitride layer over a substrate. The process includes removing the nitride layer over a field region, forming spacers on the side walls of the remaining nitride layer, and doping an impurity into the field region using the spacers as a mask. The method aims to thermally oxidize the substrate exposed in the field region, grow the field oxide layer, and planarize the upper portion of the field oxide layer through an etchback process. This innovative approach reduces the step coverage problem of the field oxide layer, thereby minimizing the size of the bird's beak and stress at the edges of the field region. Additionally, the heavily doped channel stop layer is formed only in the middle section of the field region, which helps prevent the lowering of the breakdown voltage and punch-through.

Career Highlights

Weon-sik Paek is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics and semiconductor industry. His work at Samsung has allowed him to be at the forefront of technological advancements in semiconductor manufacturing.

Collaborations

Throughout his career, Weon-sik Paek has collaborated with notable colleagues, including Taek-Yong Jang and Weon-taek Choi. These collaborations have contributed to the development of innovative solutions in the semiconductor field.

Conclusion

Weon-sik Paek's contributions to semiconductor technology, particularly through his patented methods, highlight his role as an influential inventor in the industry. His work continues to impact the efficiency and reliability of semiconductor devices, showcasing the importance of innovation in technology.