Weon-Mook Lee

Title: Weon-Mook Lee: Innovator in Plasma Reactor Technology

Introduction

Weon-Mook Lee is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of plasma technology, particularly through his innovative designs and patents. His work focuses on enhancing the efficiency and effectiveness of plasma reactors used in various applications.

Latest Patents

One of Weon-Mook Lee's key patents is titled "Plasma reactor having multiple antenna structure." This invention involves a plasma reactor that includes a chamber where a wafer is treated by a plasma reaction. The chamber is equipped with a cylindrical dielectric window at its upper portion. A multiple antenna structure is strategically placed on both the upper and lower portions of the dielectric window to generate an RF magnetic field. This field is applied inside the chamber through the dielectric window, which in turn generates an RF electric field. Additionally, an RF electric power supply unit is incorporated to allow for time variation of the magnetic field produced by the multiple antenna structure. This innovative design enhances the performance of plasma reactors, making them more effective for various industrial applications.

Career Highlights

Weon-Mook Lee is currently associated with DMS Co., Ltd., where he continues to develop and refine technologies related to plasma reactors. His expertise and innovative mindset have positioned him as a valuable asset in the field of plasma technology.

Conclusion

Weon-Mook Lee's contributions to plasma reactor technology exemplify the spirit of innovation and dedication to advancing scientific understanding. His patent on the plasma reactor with a multiple antenna structure showcases his commitment to improving industrial processes.