Company Filing History:
Years Active: 2014-2015
Title: Innovations of WenLiang Li in Semiconductor Technology
Introduction
WenLiang Li is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor technology, particularly in the area of wafer flatness detection. With a total of 2 patents, his work has advanced the methods used in the manufacturing and quality control of semiconductor devices.
Latest Patents
WenLiang Li's latest patents include an "Apparatus for detecting the flatness of wafer and the method thereof." This innovative apparatus consists of multiple detector elements, a metal sink, and injection pipes. The method involves injecting ultra-pure water into the detector elements and emitting parallel beams to calculate the height of the detecting point on the silicon wafer surface. This technique allows for accurate measurement of the flatness condition of the wafer surface, including the photo-resist layer.
Another notable patent is the "Phase shift focus monitor reticle, manufacturing method thereof and method for monitoring focus difference." This invention features a phase shift focus monitor reticle that includes a shield with light-transmitting portions and a glass layer with openings. The design allows for effective monitoring of focus differences in various photoresist applications and process machines.
Career Highlights
WenLiang Li is currently employed at Shanghai Huali Microelectronics Corporation, where he continues to innovate in the semiconductor industry. His work has been instrumental in enhancing the precision and efficiency of semiconductor manufacturing processes.
Collaborations
Throughout his career, WenLiang Li has collaborated with notable colleagues, including Lijun Chen and Jian Ding. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
WenLiang Li's contributions to semiconductor technology through his patents and work at Shanghai Huali Microelectronics Corporation highlight his role as a key innovator in the field. His inventions not only improve manufacturing processes but also set new standards for quality in the industry.