Wenli Wu

Title: Innovations of Wenli Wu in High Aspect Ratio Structures

Introduction

Wenli Wu is an accomplished inventor based in Rockville, MD (US). He has made significant contributions to the field of semiconductor devices, particularly in the characterization of high aspect ratio (HAR) structures. His innovative methods have advanced the understanding and analysis of these complex structures.

Latest Patents

Wenli Wu holds a patent titled "Determining tilt angle in patterned arrays of high aspect-ratio structures by small-angle x-ray scattering." This patent involves methods and apparatus for characterizing HAR structures in semiconductor devices. The techniques utilize small angle X-ray scattering (SAXS) to determine average parameters of an array of HAR structures. The analysis includes parameters such as tilt, sidewall angle, bowing, and the presence of multiple tilts in HAR structures.

Career Highlights

Throughout his career, Wenli Wu has worked with notable organizations, including Lam Research Corporation and the Government of the United States of America, as represented by the Secretary of Commerce. His work has been instrumental in enhancing the capabilities of semiconductor manufacturing and analysis.

Collaborations

Wenli Wu has collaborated with esteemed colleagues such as William Dean Thompson and Regis Joseph Kline. These partnerships have contributed to the advancement of research and development in the field of semiconductor technology.

Conclusion

Wenli Wu's innovative work in the characterization of high aspect ratio structures has made a lasting impact on the semiconductor industry. His contributions continue to influence the development of advanced manufacturing techniques.