Wen-Li Tsai

Title: Innovations of Wen-Li Tsai

Introduction

Wen-Li Tsai is a notable inventor based in Renwu Township, Kaohsiung County, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approaches.

Latest Patents

One of his latest patents is titled "Method of making planar-type bottom electrode for semiconductor device." This patent discloses a method involving the formation of a sacrificial layer structure on a substrate. Multiple first trenches are defined in the sacrificial layer structure, arranged in a first direction. These trenches are filled with insulating material to create an insulating layer. Additionally, multiple second trenches are defined between the insulating layers, arranged in a second direction that intersects the first trenches. These second trenches are filled with bottom electrode material, forming a bottom electrode layer. The insulating layers serve to separate the bottom electrode layers from each other. Finally, the sacrificial layer structure is removed to define a receiving space by two adjacent insulating layers and two adjacent bottom electrode layers.

Another significant patent is the "Real-time system for monitoring and controlling film uniformity and method of applying the same." This invention is adapted for a PVD apparatus and includes a shielding plate, a monitoring device, and a data processing program. The shielding plate is positioned on the inner wall of a reaction chamber above a wafer stage, with an opening that exposes the wafer. The monitoring device, which includes a scanner and a sensor, measures the flux of particles on every portion of the wafer to acquire real-time uniformity data. The data processing program compares this data with reference uniformity data, outputting a feedback signal to the PVD apparatus to adjust process parameters for controlling film uniformity.

Career Highlights

Wen-Li Tsai is currently employed at Promos Technologies, Inc., where he continues to develop innovative solutions in semiconductor technology. His work has significantly impacted the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Wen-Li collaborates with talented individuals such as Hsiao-Che Wu and Yu-Min Tsai, who contribute to the innovative environment at Promos Technologies, Inc.

Conclusion

Wen-Li Tsai's contributions to semiconductor technology through his patents demonstrate his commitment to innovation and excellence in the field. His work continues to influence advancements in manufacturing processes, showcasing