This inventor holds 1 USPTO granted patent. Top assignee: Advanced Micro Devices Corporation. Active years: 2002.
Company Filing History:
Years Active: 2002
Title: Weiwen Ou - Innovator in Semiconductor Cleaning Processes
Introduction
Weiwen Ou is a notable inventor based in Berkeley, CA, who has made significant contributions to the field of semiconductor manufacturing. She is recognized for her innovative cleaning processes that enhance the efficiency and effectiveness of silicon wafer preparation.
Latest Patents
Weiwen Ou holds a patent for the "Salsa clean process," which is a wet spray cleaning method designed to remove thick organic layers, including hardened photoresist, from silicon wafer surfaces. This process is particularly effective for photoresist thicknesses up to 3 microns and ensures low residual particle counts. The cleaning method employs multiple cycles of SPM/DI/APM/DI without an intervening drying step, maintaining low residual particle density for oxide-covered wafer regions.
Career Highlights
Weiwen Ou is currently employed at Advanced Micro Devices Corporation, where she continues to develop and refine cleaning processes that are critical to semiconductor fabrication. Her work has been instrumental in improving the quality and reliability of semiconductor devices.
Collaborations
Throughout her career, Weiwen has collaborated with esteemed colleagues, including Jacques J Bertrand and Barry Dick, contributing to advancements in semiconductor technology.
Conclusion
Weiwen Ou's innovative contributions to semiconductor cleaning processes exemplify her commitment to enhancing manufacturing techniques in the industry. Her work continues to influence the field and drive progress in semiconductor technology.