Company Filing History:
Years Active: 2025
Title: Wei Lu - Innovator in Substrate Processing Technologies
Introduction
Wei Lu is a prominent inventor based in Fremont, CA, known for his contributions to substrate processing technologies. He holds a total of 2 patents that focus on improving the efficiency and effectiveness of substrate cleaning and polishing processes. His work is instrumental in advancing the semiconductor manufacturing industry.
Latest Patents
Wei Lu's latest patents include innovative technologies that enhance substrate processing. The first patent, titled "Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning," describes a load cup design that incorporates an annular substrate station. This design features a nebulizer with energized fluid nozzles that release fluid at an upward angle, effectively cleaning the substrate edges. The second patent, "Wafer edge asymmetry correction using groove in polishing pad," outlines a chemical mechanical polishing system. This system synchronizes the lateral oscillation and rotation of the carrier head to ensure precise polishing of the substrate edges.
Career Highlights
Wei Lu is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has allowed him to develop cutting-edge technologies that address critical challenges in substrate processing. His innovative solutions have contributed to the company's reputation for excellence in manufacturing equipment.
Collaborations
Wei Lu has collaborated with notable colleagues, including Jimin Zhang and Jianshe Tang. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies in the field of substrate processing.
Conclusion
Wei Lu's contributions to substrate processing technologies through his patents and work at Applied Materials, Inc. highlight his significant impact on the semiconductor industry. His innovative approaches continue to drive advancements in manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.