Canby, OR, United States of America

Wayne Fetters


Average Co-Inventor Count = 2.2

ph-index = 6

Forward Citations = 458(Granted Patents)


Company Filing History:


Years Active: 2000-2004

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6 patents (USPTO):

Title: The Innovative Contributions of Wayne Fetters

Introduction

Wayne Fetters, an accomplished inventor based in Canby, OR, has made significant strides in the field of electroplating and thermal processing. With a total of six patents to his name, Fetters' innovative work focuses on improving the efficiency and effectiveness of manufacturing processes in the semiconductor industry.

Latest Patents

Fetters' latest innovations include the "Electroless Copper Deposition Apparatus," designed to enhance the holding of work pieces during electroless plating. This apparatus features improved components specifically created for high-temperature applications, overcoming challenges associated with traditional O-rings that may stick to surfaces during processing. By implementing a cantilever member in place of O-rings and integrating a heat transfer system, Fetters ensures precise temperature control of the work piece during plating.

Another notable invention is the "Apparatus for Electroplating Copper onto Semiconductor Wafer." This device includes a unique cup with a central aperture that incorporates a compliant seal to prevent contamination during the electroplating process. By applying pressure behind the compliant seal and utilizing a rotating wafer, Fetters effectively eliminates bubble entrapment on the wafer surface. His design also allows for the arrangement of contacts in banks for better testing of electrical connections.

Career Highlights

Wayne Fetters contributes his expertise to Novellus Systems Incorporated, a prominent player in the semiconductor equipment industry. His inventive spirit has led to advancements that benefit manufacturing efficiency and product quality, showcasing his commitment to innovation. His work at Novellus Systems has solidified his standing as a significant contributor to his field.

Collaborations

Throughout his career, Fetters has worked alongside esteemed colleagues such as Evan E Patton and Edmund Minshall. These collaborations have fostered a creative environment, enabling the development and refinement of his groundbreaking inventions in electroplating technology.

Conclusion

Wayne Fetters' contributions to the semiconductor industry are marked by his innovative patents that address critical challenges in electroplating and thermal processing. His dedication to improving manufacturing techniques not only reflects his passion for invention but also enhances the quality and efficiency of semiconductor production. As technology continues to evolve, the impact of his work will undoubtedly pave the way for future innovations in the field.

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