Company Filing History:
Years Active: 1990
Title: Walter Torbert: Innovator in Wafer Polishing Technology
Introduction
Walter Torbert is a notable inventor based in Newark, CA (US), recognized for his contributions to the field of wafer polishing technology. With a focus on enhancing the efficiency and effectiveness of polishing apparatus, Torbert has made significant strides in the industry.
Latest Patents
Torbert holds a patent for a groundbreaking invention titled "Floating Subcarriers for Wafer Polishing Apparatus." This innovative polishing apparatus features a conventional carrier equipped with multiple floating subcarriers. The design allows for the benefits of single wafer polishing while maintaining the economies of multiple wafer polishing. Each subcarrier is designed to hold a single wafer on its underside, providing axial freedom that mimics the dynamics of single wafer polishing. The required axial freedom is achieved through mechanical springs or pneumatic/hydraulic devices. Additionally, variations of the design allow for auto-rotational freedom and rotational driving of the subcarriers. This invention ensures that the wafers are polished uniformly, significantly improving the total indicated reading of the maximum deviation on the wafer surface.
Career Highlights
Walter Torbert is associated with Siltech Corporation, where he has applied his expertise in developing advanced polishing technologies. His work has contributed to the company's reputation for innovation in the semiconductor manufacturing sector.
Collaborations
Throughout his career, Torbert has collaborated with esteemed colleagues, including Kenneth C. Struven and Robert E. Lorenzini. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in technology.
Conclusion
Walter Torbert's innovative approach to wafer polishing technology has made a lasting impact on the industry. His patent for floating subcarriers exemplifies his commitment to enhancing manufacturing processes. Through his work at Siltech Corporation and collaborations with fellow inventors, Torbert continues to push the boundaries of innovation in semiconductor technology.
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