Company Filing History:
Years Active: 2012
Title: Walter Kögler: Innovator in Charged Particle Beam Technology
Introduction
Walter Kögler is a notable inventor based in Munich, Germany. He has made significant contributions to the field of charged particle beam technology. His innovative work has led to the development of a unique device that enhances the inspection and structuring of specimens.
Latest Patents
Walter Kögler holds a patent for a "Charged particle beam device with retarding field analyzer." This invention provides a charged particle beam device designed to inspect or structure a specimen using a primary charged particle beam that propagates along an optical axis. The device includes a beam tube element with a tube voltage and a retarding field analyzer positioned near the beam tube element to detect secondary charged particles generated by the primary beam on the specimen. The retarding field analyzer features an entrance grid electrode at a second voltage, at least one filter grid electrode at a first voltage, and a charged particle detector for secondary charged particles. Additionally, it incorporates further electrode elements that reduce stray field regions in the retarding electric field, significantly improving energy resolution, especially when the beam tube element is part of a high voltage beam tube.
Career Highlights
Walter Kögler is associated with Ict Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH, where he applies his expertise in semiconductor testing and charged particle beam technology. His work has been instrumental in advancing the capabilities of charged particle beam devices.
Collaborations
Walter has collaborated with notable colleagues, including Ralf Degenhardt and Hans-Peter Feuerbaum, contributing to the development of innovative technologies in their field.
Conclusion
Walter Kögler's contributions to charged particle beam technology exemplify the impact of innovation in scientific research and development. His patented device represents a significant advancement in the ability to inspect and structure specimens with precision.