Company Filing History:
Years Active: 1997
Title: W Murray Bullis: Innovator in Topographic Instrument Calibration
Introduction
W Murray Bullis is a notable inventor based in Sunnyvale, California. He has made significant contributions to the field of topographic instruments, particularly in methods for calibration at sub-micrometer resolution levels. With a total of two patents to his name, Bullis continues to push the boundaries of innovation in his field.
Latest Patents
Bullis's latest patents include a "Method for calibrating a topographic instrument" and the "Formation of atomic scale vertical features for topographic instrument." The first patent outlines a method for calibrating topographic instruments that operate at sub-micrometer resolution levels. This method involves providing a calibration standard with a known one-dimensional power spectral density function. The roughness is calculated from this function in relation to an atomic scale topographic dimension. The roughness of the calibration standard is measured by detecting light scattering and computing an isotropic power spectral density curve. The measured roughness is then compared against the calculated roughness to determine if they coincide.
The second patent describes a calibration target for topographic inspection instruments, which also operate at sub-micrometer resolution levels. This target features atomic scale vertical dimensions, specifically on the order of 10 Angstroms in height. The features are formed on a silicon substrate by depositing a thick oxide over the wafer surface. A pattern of features is then etched to the level of raw silicon, creating atomic scale vertical topographic dimensions. Millions of such features can be produced simultaneously on a wafer, mimicking the effect of haze or micro-roughness on a polished wafer.
Career Highlights
W Murray Bullis is currently employed at VLSI Standards, Inc., where he applies his expertise in topographic instruments. His work has been instrumental in advancing the calibration methods used in high-precision instruments.
Collaborations
Bullis has collaborated with notable colleagues, including Ellen R Laird and James J Greed, Jr. Their combined efforts contribute to the innovative work being done in the field of topographic instrument calibration.
Conclusion
W Murray Bullis is a distinguished inventor whose work in topographic instrument calibration has made a significant impact in the field. His innovative patents and collaborations highlight his commitment to advancing technology in precision measurement.