Volker Tegeder

Title: The Innovative Contributions of Volker Tegeder

Introduction

Volker Tegeder is a notable inventor based in Weissig, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on advanced monitoring and metrology devices that enhance the efficiency and accuracy of semiconductor processing.

Latest Patents

One of Tegeder's latest patents is an "Apparatus for monitoring intentional or unavoidable layer depositions and method." This innovative apparatus allows for the monitoring of layer depositions within a process chamber. It features a light source, a sensor element, and at least one light detector. The sensor element is designed to influence the intensity of the light beam measured by the detector based on the thickness of the layer growing on it. The novel monitoring method utilizes this apparatus to measure transmitted light intensity, observing the light as a function of the opening covered by the growing layer.

Another significant patent is the "Self-supporting adaptable metrology device." This device is designed to be coupled to a load port of a semiconductor product handling and processing tool. It maintains a mini-environmental atmosphere and includes a load port table for supporting devices. The metrology device features a housing that preserves an inner atmosphere, a coupling region for connecting to the mini-environmental atmosphere, and a measuring device for assessing semiconductor product properties. Notably, the device is self-supporting, allowing it to be coupled to the load port without requiring support from the load port table.

Career Highlights

Throughout his career, Volker Tegeder has demonstrated a commitment to innovation in semiconductor technology. His patents reflect a deep understanding of the complexities involved in layer deposition and metrology, showcasing his ability to develop solutions that address industry challenges.

Collaborations

Tegeder has collaborated with notable colleagues, including Detlef Gerhard and Johannes Lechner. Their combined expertise has contributed to the advancement of technologies in their field.

Conclusion

Volker Tegeder's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His innovative approaches to monitoring and metrology devices continue to impact the industry positively.