This inventor holds 1 USPTO granted patent. Top assignee: Infineon Technologies Ag. Active years: 2001.
Company Filing History:
Years Active: 2001
Title: Volker Penka: Innovator in Semiconductor Fabrication
Introduction
Volker Penka, based in Unterhaching, Germany, is an accomplished inventor known for his significant contributions to semiconductor technology. With one patent to his name, he has made a notable impact in the field of semiconductor component fabrication.
Latest Patents
Volker Penka's patent revolves around a "Method for Fabricating a Semiconductor Component Having a Low Contact Resistance with Respect to Heavily Doped Zones." This innovative method entails implanting fluorine ions into heavily doped or siliconized zones in a semiconductor body before applying a titanium layer. By doing so, any oxide layers present in the contact hole region can be effectively broken down with a reduced amount of titanium, resulting in a thinner titanium layer being sufficient. Furthermore, this method promotes the formation of titanium silicide in the contact hole, enhancing overall performance.
Career Highlights
Penka works at Infineon Technologies AG, a leading player in the global semiconductor industry. His expertise in semiconductor fabrication techniques signifies his commitment to advancing technology and contributing to the efficiency of semiconductor components.
Collaborations
Throughout his career, Volker Penka has collaborated with several esteemed colleagues, including Reinhard Mahnkopf and Helmut Wurzer. These professional partnerships have fostered a rich environment for innovative ideas and advancements in semiconductor fabrication technology.
Conclusion
Volker Penka’s contributions to semiconductor technology highlight the importance of innovation within the industry. His patented method for improving contact resistance in semiconductor components showcases his dedication to enhancing performance and efficiency, further establishing his reputation as a noteworthy inventor in the field.