This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2022.
Company Filing History:
Years Active: 2022
Title: Vivien Chua: Innovator in Semiconductor Processing
Introduction
Vivien Chua is a prominent inventor based in Milpitas, CA (US). She has made significant contributions to the field of semiconductor processing, showcasing her expertise through her innovative patents.
Latest Patents
Vivien holds a patent titled "Processing systems and methods to control process drift." This patent outlines exemplary methods of semiconductor processing, which may include forming a plasma of a fluorine-containing precursor. The methods also involve performing a chamber clean in a processing region of a semiconductor processing chamber. The processing region is defined between a faceplate and a substrate support. Additionally, the methods include generating aluminum fluoride during the chamber clean and contacting surfaces within the processing region with a carbon-containing precursor. The process culminates in the volatilization of aluminum fluoride from the surfaces of the processing region. Vivien has 1 patent to her name.
Career Highlights
Vivien Chua is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. Her work focuses on advancing technologies that enhance semiconductor manufacturing processes.
Collaborations
Vivien has collaborated with notable colleagues, including Prashant Kumar Kulshreshtha and Zhijun Jiang. These collaborations have contributed to her innovative work in the field.
Conclusion
Vivien Chua is a trailblazer in semiconductor processing, with a patent that reflects her innovative spirit and technical expertise. Her contributions continue to shape the future of semiconductor technology.