Location History:
- Santa Clara, CA (US) (1999)
- Cupertino, CA (US) (1996 - 2002)
Company Filing History:
Years Active: 1996-2002
Title: Innovations by Visweswaren Sivaramakrishnam
Introduction
Visweswaren Sivaramakrishnam is a notable inventor based in Cupertino, CA. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on advanced processes and apparatuses for thin film applications, which are crucial in the semiconductor industry.
Latest Patents
One of his latest patents is titled "Apparatus for vaporization sequence for multiple liquid precursors used in semiconductor thin film applications." This invention describes a process for the processing of thin films on semiconductor substrates using multiple liquid precursor sources. The method involves vaporizing the liquid precursor with the highest vapor pressure first and introducing it into a common manifold connected to a processing chamber. This innovative approach allows for a controlled introduction of subsequent liquid precursors, maintaining a temperature gradient to prevent premature boiling or condensation.
Another significant patent is the "Method and apparatus for forming a thin polymer layer on an integrated circuit." This invention outlines a method for forming thin polymer layers on semiconductor substrates through the sublimation of stable dimer parylene material. The process includes the pyrolytic conversion of gaseous dimer material into reactive monomers, which can be blended with other polymerizable materials. The apparatus described ensures effective distribution of gases, temperature control, and the prevention of polymerization in the gas phase.
Career Highlights
Visweswaren Sivaramakrishnam is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work has been instrumental in advancing technologies that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
He has collaborated with notable coworkers such as Hiroshi Nishizato and Jun Zhao, contributing to the development of innovative solutions in semiconductor technology.
Conclusion
Visweswaren Sivaramakrishnam's contributions to the field of semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as a key innovator in the industry. His inventions continue to influence the advancement of semiconductor manufacturing processes.