Company Filing History:
Years Active: 2001-2002
Title: Victor Ku: Innovator in Semiconductor Technology
Introduction
Victor Ku is a notable inventor based in San Antonio, TX (US). He has made significant contributions to the field of semiconductor technology, particularly in methods for reducing contact resistance. With a total of 2 patents, his work has had a substantial impact on the industry.
Latest Patents
Victor Ku's latest patents focus on innovative methods for reducing semiconductor contact resistance. One of his key inventions involves the use of fluorocarbon plasmas during high selectively sub-quarter-micron contact hole etching. This method addresses the challenges associated with silicon dioxide (SiO), silicon nitride (SiN), and silicide (TiSi) layers. The process utilizes a high etch selective chemistry to first remove SiO, followed by a switch to another chemistry that maintains high selectivity of SiN to TiSi. By employing fluorocarbon plasmas with a high carbon-to-fluorine ratio, reactive unsaturated polymers are formed, which adhere effectively to contact sidewalls and bottoms. However, it was discovered that fluorine from the polymer can degrade the etch selectivity of SiN to TiSi. To counter this, various polymer removal methods are proposed to restore etch selectivity, applicable to any highly selective etching of oxide versus nitride.
Career Highlights
Throughout his career, Victor Ku has worked with prominent companies in the technology sector. Notably, he has been associated with Philips Electronics Ltd and VLSI Technology, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies.
Collaborations
Victor Ku has collaborated with various professionals in his field, including Delbert H Parks. These collaborations have further enriched his work and innovations in semiconductor technology.
Conclusion
Victor Ku stands out as an influential inventor in the semiconductor industry. His innovative methods for reducing contact resistance have paved the way for advancements in technology. His contributions continue to shape the future of semiconductor applications.