Company Filing History:
Years Active: 1992-2001
Title: Innovations by Vaughn P Gross
Introduction
Vaughn P Gross is a notable inventor based in St. Albans, VT (US). He holds a total of 4 patents that contribute significantly to the field of semiconductor technology. His work focuses on enhancing the efficiency and effectiveness of photolithography processes.
Latest Patents
One of his latest patents is the "Static Resistant Reticle." This invention is designed for use in photolithography, featuring optimal transmission and reduced electrostatic discharge. The reticle consists of a substrate, a patterning layer, and two layers of materials with differing refractive indices. The first layer has a higher refractive index and is conductive, while the second layer has a lower refractive index. This configuration creates an anti-reflective coating that optimizes light transmission through the reticle substrate to approximately 98.0% to 99.5% at wavelengths between 360 nm and 370 nm. The conductivity of the layers further minimizes electrostatic discharge, enhancing the delineation of patterns projected onto silicon wafers used in semiconductor devices.
Another significant patent is related to the "Generation of Ionized Air for Semiconductor Chips." This innovation allows for the ionization of air without the use of corona discharge tips, thus avoiding particulate generation from corrosion. By utilizing a laser beam focused on a small volume of intense electric field, the air can be ionized effectively. This ionized air is then directed along the chip surface to discharge any accumulated charge during the manufacturing process. Additionally, the invention includes a method for ionization through the injection of water molecules into the air, which are subsequently ionized by a laser beam.
Career Highlights
Vaughn P Gross is currently associated with International Business Machines Corporation (IBM), where he continues to innovate in the semiconductor field. His contributions have been pivotal in advancing technologies that improve manufacturing processes.
Collaborations
He has collaborated with notable coworkers such as Kenneth D Murray and John Samuel Batchelder, further enhancing the impact of his inventions.
Conclusion
Vaughn P Gross is a distinguished inventor whose work in semiconductor technology has led to significant advancements. His patents reflect a commitment to innovation and efficiency in the industry.