This inventor holds 1 USPTO granted patent. Top assignee: Lam Research Corporation. Active years: 2015.
Company Filing History:
Years Active: 2015
Title: Valid Vahedi: Innovator in Plasma Processing Technology
Introduction
Valid Vahedi is a notable inventor based in Albany, California. He has made significant contributions to the field of plasma processing technology, particularly with his innovative patent that enhances the efficiency of gas injection systems.
Latest Patents
Valid Vahedi holds a patent for a "Tunable Multi-Zone Gas Injection System." This invention is designed for plasma processing systems used in the treatment of substrates, such as semiconductor wafers. The system features a plasma processing chamber and a substrate support that holds the substrate within the chamber. A dielectric member forms a wall of the processing chamber, and a gas injector is integrated into this design. The gas injector includes multiple outlets that supply process gas at adjustable flow rates to different zones of the chamber. This arrangement allows for independent adjustment of gas flow, catering to specific processing needs. Additionally, the design offers a more economical and convenient replacement option compared to traditional consumable showerhead arrangements.
Career Highlights
Valid Vahedi is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that improve plasma processing efficiency and effectiveness.
Collaborations
Throughout his career, Valid has collaborated with esteemed colleagues, including David J Cooperberg and Douglas Ratto. These partnerships have contributed to the development of innovative solutions in the field.
Conclusion
Valid Vahedi's contributions to plasma processing technology through his patent for a tunable multi-zone gas injection system exemplify his commitment to innovation. His work at Lam Research Corporation continues to influence advancements in the semiconductor industry.