Ulrich Hofer

Title: Ulrich Hofer: Innovator in Real-Time Endpoint Detection

Introduction

Ulrich Hofer is a notable inventor based in Munich, Germany. He has made significant contributions to the field of technology, particularly in the area of real-time endpoint detection. His innovative work has led to the development of a patented method and apparatus that enhances the precision of etching processes in various applications.

Latest Patents

Ulrich Hofer holds a patent for a "Method and apparatus for real-time, in-situ endpoint detection." This invention involves a sophisticated technique for detecting the etching endpoint of a film on a substrate. The method utilizes a first excitation beam of light with a specific wavelength, which is directed at an interface between the film and the substrate. The reflected light generates a second harmonic component that is detected and normalized in real-time, providing an output signal that indicates the occurrence of a prescribed change corresponding to the etching endpoint.

Career Highlights

Ulrich Hofer is associated with the International Business Machines Corporation (IBM), where he has contributed to various projects and innovations. His expertise in optical detection methods has positioned him as a key figure in advancing technology within the company.

Collaborations

Throughout his career, Ulrich has collaborated with esteemed colleagues such as Steven G Barbee and Tony F Heinz. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Ulrich Hofer's contributions to real-time endpoint detection exemplify the impact of innovative thinking in technology. His patented methods not only enhance precision in etching processes but also reflect the collaborative spirit of research and development in the industry.