Tuck Foong Koh

Title: Tuck Foong Koh: Innovator in Electrostatic Chuck Design

Introduction

Tuck Foong Koh is a notable inventor based in Singapore, recognized for his contributions to the field of electrostatic chuck design. His innovative work has led to the development of a unique patent that enhances substrate support technology.

Latest Patents

Tuck Foong Koh holds a patent for a spray-coated electrostatic chuck design. This invention includes a substrate support featuring a metal body with a substrate face, multiple lift pin holes, and a dielectric coating on the substrate face. Each lift pin hole is designed with a through hole and a chamfer face that aligns with a lift pin sleeve. The dielectric coating is characterized by a substrate supporting surface, a specific thickness, and a distinct pattern integrated into the substrate supporting surface. This patent represents a significant advancement in the technology used for substrate support in various applications.

Career Highlights

Tuck Foong Koh is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His role at the company allows him to leverage his expertise in developing innovative solutions that meet the demands of modern technology.

Collaborations

Tuck Foong Koh collaborates with Yuichi Wada, a fellow innovator in the industry. Their partnership exemplifies the spirit of teamwork and innovation that drives advancements in technology.

Conclusion

Tuck Foong Koh's contributions to the field of electrostatic chuck design highlight his role as a significant inventor in Singapore. His patent for the spray-coated electrostatic chuck design showcases his innovative spirit and commitment to advancing technology.