Kawasaki, Japan

Tsuyoshi Suzuki


Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 119(Granted Patents)


Company Filing History:


Years Active: 1981-1996

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2 patents (USPTO):Explore Patents

Title: Tsuyoshi Suzuki: Innovator in Plasma Treatment Technology

Introduction

Tsuyoshi Suzuki is a notable inventor based in Kawasaki, Japan. He has made significant contributions to the field of plasma treatment technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and safety of plasma treatment processes, particularly in semiconductor manufacturing.

Latest Patents

One of Tsuyoshi Suzuki's latest patents is a plasma treatment apparatus designed to prevent electrical discharge during plasma treatment. This invention involves a gas supply conduit fitted with cylindrical flowpath members made of two types of electrically insulating materials. These materials contain a multiplicity of axially extending small-diameter conduction holes, which increase the electrical discharge start voltage, thereby preventing unwanted electrical discharges. This innovative design ensures that water does not remain between the wafer and the electromagnetic chuck, facilitating the removal of electric charge and reducing the time required for exhausting the treatment chamber. Another patent involves rapidly cured polyurethane elastomers, which are prepared by mixing specific components to achieve efficient curing properties.

Career Highlights

Throughout his career, Tsuyoshi Suzuki has worked with prominent companies in the technology sector. He has been associated with Tokyo Electron Limited and Mitsui-Nisso Corporation, where he has contributed to various innovative projects and advancements in semiconductor technology.

Collaborations

Tsuyoshi has collaborated with notable professionals in his field, including Satoru Kawakami and Junichi Arami. These collaborations have further enriched his work and contributed to the development of cutting-edge technologies.

Conclusion

Tsuyoshi Suzuki's contributions to plasma treatment technology and his innovative patents highlight his role as a significant inventor in the semiconductor industry. His work continues to influence advancements in manufacturing processes, ensuring greater efficiency and safety.

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