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Tsuyoshi Naraki

USPTO Granted Patents = 13

Average Co-Inventor Count = 2.8

ph-index = 7

Forward Citations = 407(Granted Patents)

Location History:

Setagaya-ku, JP (2000)
Tokyo, JP (1987 - 2003)

Company Filing History:

10 out of 8,898

Nikon Corporation

Nippon Kogaku K.k.

1 out of 25,561

Sharp Kabushiki Kaisha Corporation

4. 1 out of 832,891

Other

patents

Years Active: 1987-2003

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13 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6617097 - Exposure method (2003-09-09),

2. 6496249 - Exposure apparatus (2002-12-17),

3. 6479832 - Surface height detecting apparatus and exposure apparatus using the same (2002-11-12),

4. RE37361 - Scanning type exposure apparatus and exposure method (2001-09-11),

5. 6239861 - Exposure method and scanning type exposure apparatus (2001-05-29),

6. 6134007 - Method for measuring orthogonality having a third interferometer which (2000-10-17),

7. 5995225 - Method for measuring orthogonality in a stage of an exposure apparatus (1999-11-30),

8. 5668624 - Scan type exposure apparatus (1997-09-16),

9. 5625436 - Scanning type exposure apparatus and exposure method (1997-04-29),

10. 5581075 - Multi-beam scanning projection exposure apparatus and method with beam (1996-12-03),

11. 5579147 - Scanning light exposure apparatus (1996-11-26),

12. 5207505 - Illumination light source device (1993-05-04),

13. 4655584 - Substrate positioning apparatus (1987-04-07),

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