Company Filing History:
2 out of 832,843 Years Active: 2001-2002
Title: Tsutomu Doi: Innovator in Semiconductor Processing Technologies
Introduction
Tsutomu Doi is a notable inventor based in Yokohama, Japan. He has made significant contributions to the field of semiconductor processing, holding a total of 2 patents. His work focuses on improving the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Doi's latest patents include a substrate processing method and processing apparatus. This invention provides a cleaning method for a laser mark formed on a semiconductor wafer. In this method, a semiconductor wafer is rotated in a circumferential direction, and a laser mark is detected either indirectly or directly in a non-contact manner. The rotation of the semiconductor wafer is controlled based on the detection of the laser mark, and an ultrasonic vibration-applied processing solution is sprayed onto the laser mark.
Another significant patent is the spin-processing apparatus and spin-processing method. This invention offers a spin-processing apparatus that is less likely to produce mist when an object to be processed is rotated. The apparatus features a cup body with a lower cup and an upper cup that can move up and down. It includes a rotation body that retains the object mounted within the cup body, a step motor that rotationally drives the rotation body, an exhaust tube connected to the bottom of the lower cup to allow gas in the cup body to be exhausted, and a scatter-proof cover provided within the upper cup above the rotation body.
Career Highlights
Throughout his career, Tsutomu Doi has focused on advancing semiconductor technologies. His innovative approaches have led to practical solutions that enhance the manufacturing process, making it more efficient and reliable.
Collaborations
Doi has collaborated with notable colleagues such as Tatsuo Abe and Yoshiaki Kurokawa. Their combined expertise has contributed to the development of advanced technologies in the semiconductor industry.
Conclusion
Tsutomu Doi is a prominent figure in the field of semiconductor processing, with a focus on innovative solutions that improve manufacturing efficiency. His contributions through patents and collaborations continue to influence the industry positively.