This inventor holds 1 USPTO granted patent. Top assignee: Applied Materials, Inc.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: The Innovative Contributions of Tsungjui Liu
Introduction
Tsungjui Liu is a notable inventor based in San Jose, California. He has made significant contributions to the field of semiconductor technology. His work focuses on improving processes that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of Tsungjui Liu's key patents is titled "Silicon nitride damage-free dry etch method for tungsten removal in middle of line bottom-up tungsten integration." This patent describes a method of filling a feature in a semiconductor structure with metal. The process includes depositing a metal cap layer on the bottom surface of a feature formed within a dielectric layer. It also involves partially filling the feature from the bottom surface with a flowable polymer layer. The method further details a metal pullback process to selectively remove the metal cap layer on the top surfaces of the dielectric layer. This innovative approach utilizes a first etch process with molybdenum hexafluoride (MoF) and a second etch process to ensure the integrity of the dielectric layer.
Career Highlights
Tsungjui Liu is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His expertise and innovative methods have contributed to advancements in semiconductor manufacturing processes. With a total of 1 patent, he continues to push the boundaries of technology in his field.
Collaborations
Throughout his career, Tsungjui Liu has collaborated with talented individuals such as Qihao Zhu and Chi Hong Ching. These collaborations have fostered an environment of innovation and creativity, leading to significant advancements in their projects.
Conclusion
Tsungjui Liu's contributions to semiconductor technology exemplify the impact of innovative thinking in the industry. His patent on tungsten removal processes showcases his commitment to enhancing manufacturing techniques. As he continues to work at Applied Materials, Inc., his future endeavors are anticipated to further advance the field of semiconductor technology.