This inventor holds 2 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2000-2002.
Company Filing History:
Years Active: 2000-2002
Title: The Innovative Contributions of Tsungan Cheng
Introduction
Tsungan Cheng is a notable inventor based in Saratoga, CA (US). He has made significant contributions to the field of chemical mechanical polishing systems. With a total of 2 patents, Cheng's work has advanced the technology used in various applications.
Latest Patents
Cheng's latest patents include a "Carrier head with layer of conformable material for a chemical mechanical polishing system." This innovative carrier head is designed for a chemical mechanical polishing apparatus. It features a layer of conformable material that is disposed in a recess of the carrier head, providing a mounting surface for a substrate. The conformable material is elastic and can undergo normal strain in response to an applied load. Additionally, the carrier head includes a support fixture that is detachably connected to a backing fixture, a retaining ring connected directly to the conformable material, and a shield ring that projects over a portion of the layer of conformable material.
Career Highlights
Cheng is currently employed at Applied Materials, Inc., where he continues to develop cutting-edge technologies. His work has been instrumental in enhancing the efficiency and effectiveness of chemical mechanical polishing processes.
Collaborations
Throughout his career, Cheng has collaborated with esteemed colleagues, including Robert D Tolles and John H Prince. These collaborations have fostered innovation and contributed to the advancement of their shared field.
Conclusion
Tsungan Cheng's contributions to the field of chemical mechanical polishing systems exemplify his dedication to innovation. His patents and work at Applied Materials, Inc. highlight his role as a key figure in advancing technology in this area.