Company Filing History:
Years Active: 1998-2000
Title: Tsuneo Akasaki: Innovator in Photoresist Technology
Introduction
Tsuneo Akasaki is a notable inventor based in Yokohama, Japan. He has made significant contributions to the field of photoresist technology, holding a total of 3 patents. His work primarily focuses on methods and apparatuses for baking photoresist applied on substrates.
Latest Patents
Akasaki's latest patents include a method for baking photoresist applied on a substrate. This invention involves a photomask substrate, which is formed in a rectangular shape and on the surface of which photoresist is applied. The substrate is positioned above a lower heating plate, separated by a proximity distance. The lower heating plate features a heat unifying ring that surrounds the photomask substrate. The periphery of this ring is tapered at a predetermined angle. Additionally, the heat unifying ring contains a central container for the photomask substrate. An upper heating plate is arranged above the lower heating plate, equipped with a baking chamber that shields the baking section from external influences.
Another patent by Akasaki is an apparatus for baking photoresist applied on a substrate. This invention shares similarities with his method patent, emphasizing the arrangement of the photomask substrate above a lower heating plate and the incorporation of a heat unifying ring. The design ensures that the baking chamber is effectively shielded from outside interference.
Career Highlights
Tsuneo Akasaki is associated with Kabushiki Kaisha Toshiba, a prominent company known for its technological innovations. His work at Toshiba has allowed him to develop and refine his inventions in the field of photoresist technology.
Collaborations
Akasaki has collaborated with notable coworkers, including Katsuhisa Mita and Yasuo Matsuoka. Their combined expertise has contributed to advancements in their respective fields.
Conclusion
Tsuneo Akasaki's contributions to photoresist technology through his patents and work at Toshiba highlight his role as an influential inventor. His innovative methods and apparatuses continue to impact the industry positively.
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