Company Filing History:
Years Active: 1992
Title: Innovations of Tsui Y Yao in Semiconductor Manufacturing
Introduction
Tsui Y Yao is a notable inventor based in Saratoga, California, recognized for her contributions to semiconductor technology. With a patent to her name, she has made significant strides in the field of electrical connections for semiconductor devices.
Latest Patents
Her patent, titled "Technique for manufacturing interconnections for a semiconductor device," focuses on creating electrical connections to specified semiconductor or electrically conductive portions of a structure derived from a semiconductive body. The process involves depositing a titanium contact layer on the structure, followed by the formation of an electrically conductive barrier material layer consisting primarily of non-titanium refractory material. The structure is then annealed at a temperature above 550 degrees Celsius to reduce contact resistance, preferably at 600 degrees Celsius or more for a duration of 10-120 seconds in a nitrogen-rich gas atmosphere. Finally, an electrically conductive primary interconnect layer is formed over the barrier material layer, and all three layers are patterned to create a composite interconnect layer.
Career Highlights
Tsui Y Yao is associated with North American Philips Corporation, specifically within the Signetics Division. Her work has contributed to advancements in semiconductor manufacturing processes, enhancing the efficiency and effectiveness of electrical connections in devices.
Collaborations
One of her notable coworkers is Henry Wei-Ming Chung, who has collaborated with her on various projects within the semiconductor field.
Conclusion
Tsui Y Yao's innovative techniques in semiconductor manufacturing demonstrate her expertise and commitment to advancing technology in this critical area. Her contributions continue to influence the development of efficient electrical connections in semiconductor devices.