Tsuguto Sugawara

Title: **Inventor Tsuguto Sugawara: A Pioneer in Plasma Processing Technologies**

Introduction

Tsuguto Sugawara is an accomplished inventor based in Miyagi, Japan, known for his significant contributions to the field of plasma processing. With a total of three patents to his name, Sugawara's innovations are instrumental in advancing substrate support systems used in various high-tech applications.

Latest Patents

Among his latest patents, Sugawara has developed a **Substrate Support and Plasma Processing Apparatus**. This invention includes a first region designed to hold a substrate and a second region surrounding it, which is configured for an edge ring. Additionally, it features dual electrodes: a first electrode, which receives a first electrical bias, and a second electrode, which extends below the first to interact within the first region.

Another notable patent is the **Stage and Plasma Processing Apparatus**. This apparatus encompasses a plasma processing chamber with a base and an electrostatic chuck that supports both a substrate and an edge ring. It consists of multiple clamping electrodes and bias electrodes for effective processing, along with power sources that enable precise control in operations.

Career Highlights

Sugawara's inventive journey is closely linked to his role at Tokyo Electron Limited, a prominent company in the semiconductor manufacturing field. His dedication to research and development has led to the creation of innovative solutions that improve plasma processing capabilities, marking significant milestones in his career.

Collaborations

Working alongside talented professionals such as Yasuharu Sasaki and Shin Yamaguchi, Sugawara engages in collaborative efforts that enhance the impact of their research. This teamwork fosters a creative environment where complex challenges in technology can be effectively addressed.

Conclusion

Tsuguto Sugawara's work exemplifies the spirit of innovation within the field of plasma processing. With his patented technologies and collaborative spirit, he continues to push the boundaries of what is possible in the semiconductor industry. His contributions not only showcase his expertise but also play a vital role in shaping the future of technology.