Tse-Hsi “Terrence” Lee

Title: Tse-Hsi “Terrence” Lee: Innovator in MEMS Technology

Tse-Hsi “Terrence” Lee is a notable inventor based in San Jose, CA, who has made significant contributions to the field of Micro-Electro-Mechanical Systems (MEMS). His innovative approach to fabricating MEMS devices has led to advancements in sensor technology.

Latest Patents

One of Lee's key patents is titled "Method of fabricating MEMS devices using plasma etching and device therefor." This patent describes a method for fabricating a MEMS sensor device. The process involves providing a substrate, forming an integrated circuit (IC) layer over the substrate, and creating an oxide layer over the IC layer. Additionally, a metal layer is coupled to the IC layer through the oxide layer. The method further includes forming a MEMS layer with designated sense electrode portions and a proof mass portion, etching the MEMS layer to create sense electrodes and a proof mass, and incorporating a via structure that includes a ground post. This innovative method results in more well-defined edges of the proof mass structure, enhancing the performance of MEMS sensor devices.

Career Highlights

Tse-Hsi “Terrence” Lee is currently associated with Mcube, Inc., where he continues to develop cutting-edge MEMS technologies. His work has positioned him as a key player in the MEMS industry, contributing to advancements that have practical applications in various fields.

Collaborations

Lee has collaborated with notable colleagues, including M H (Ming-Hong) Kuo and W J (Wen-Chih) Chen, who have also contributed to the development of MEMS technologies.

Conclusion

Tse-Hsi “Terrence” Lee's innovative work in MEMS technology exemplifies the impact of dedicated inventors in advancing modern technology. His contributions continue to shape the future of sensor devices, making significant strides in the field.