Tsan Yuen Chan

Title: Tsan Yuen Chan: Innovator in Wafer Measurement Technology

Introduction

Tsan Yuen Chan is a notable inventor based in San Gabriel, California. She has made significant contributions to the field of wafer measurement technology. Her innovative approach has led to the development of a unique method and apparatus for measuring wafer thickness, flatness, and trench depth.

Latest Patents

Tsan Yuen Chan holds a patent for a "Wafer measurement system and apparatus." This invention provides a method for accurately measuring the back side of a trench on a wafer using non-contact optical instruments. The technology utilizes the near-infrared region to measure the thickness and trench depth of silicon wafers, which are opaque in the visible spectrum. This advancement allows for precise measurements of localized shape and flatness through a calibration method involving optical styli.

Career Highlights

Tsan Yuen Chan is currently associated with Tamar Technology, Inc., where she continues to innovate in the field of wafer measurement. Her work has garnered attention for its practical applications in semiconductor manufacturing and quality control.

Collaborations

Tsan has collaborated with notable colleagues, including David S. Marx and David L. Grant, who have contributed to her research and development efforts.

Conclusion

Tsan Yuen Chan's contributions to wafer measurement technology exemplify her innovative spirit and dedication to advancing the field. Her patent reflects a significant leap forward in the accuracy of wafer measurements, which is crucial for the semiconductor industry.