Trey Marlowe

Title: Trey Marlowe: Innovator in Semiconductor Technology

Introduction

Trey Marlowe is a notable inventor based in La Jolla, California. He has made significant contributions to the field of semiconductor technology, particularly in the area of dielectric materials used in integrated circuits. His innovative approach has led to advancements that enhance the manufacturing process of multilayered integrated circuits.

Latest Patents

Marlowe holds a patent for a "Method for curing spin-on dielectric films utilizing electron beam radiation." This patent describes an electron beam exposure method that provides a means of curing spin-on-glass or spin-on-polymer dielectric material formed on a semiconductor wafer. The dielectric material plays a crucial role in insulating the conductive metal layer and planarizing the topography during the manufacturing process. The method utilizes a large area, uniform electron beam exposure system in a soft vacuum environment. A wafer coated with uncured dielectric material is irradiated with electrons of sufficient energy to penetrate the entire thickness of the dielectric material while being simultaneously heated by infrared heaters. By adjusting various process conditions, such as electron beam total dose and energy, wafer temperature, and ambient atmosphere, the properties of the cured dielectric material can be modified.

Career Highlights

Marlowe's career is marked by his dedication to advancing semiconductor technology. His work at Electron Vision Corporation has positioned him as a key player in the industry. His innovative methods have not only improved the efficiency of semiconductor manufacturing but have also contributed to the overall quality of integrated circuits.

Collaborations

Marlowe has collaborated with notable colleagues, including William R Livesay and Matthew F Ross. These collaborations have fostered an environment of innovation and have led to further advancements in the field.

Conclusion

Trey Marlowe's contributions to semiconductor technology through his innovative patent and work at Electron Vision Corporation highlight his role as a significant inventor in the industry. His methods for curing dielectric materials are paving the way for improved manufacturing processes in integrated circuits.