Toshiyuki Kamei

Title: Innovations of Toshiyuki Kamei

Introduction

Toshiyuki Kamei is a notable inventor based in Omura, Japan. He has made significant contributions to the field of polishing technology, holding a total of 2 patents. His work focuses on improving the efficiency and effectiveness of polishing apparatuses used in various applications.

Latest Patents

Kamei's latest patents include a polishing apparatus, polishing head, and polishing method. This innovative polishing apparatus features a polishing plate with an abrasive cloth attached to its surface. It includes a chuck that holds and presses one surface of a wafer against the abrasive cloth. A circular retaining ring is concentrically arranged on the periphery of the chuck, which is both rotatable and vertically movable. During the lapping step, the retaining ring is pressed against the abrasive cloth, while it is lifted upward during the final polishing step. This design prevents lapping grains from contaminating the final polishing stage. As a result, lapping and final polishing can be conducted successively using the same polishing head, leading to cost savings in the apparatus.

Career Highlights

Toshiyuki Kamei is currently employed at Sumco Techxiv Corporation, where he continues to develop innovative solutions in polishing technology. His work has been instrumental in advancing the capabilities of polishing apparatuses, making them more efficient and cost-effective.

Collaborations

Kamei has collaborated with several talented individuals in his field, including Masamitsu Kitahashi and Hidetoshi Takeda. These collaborations have contributed to the development of cutting-edge technologies in polishing methods.

Conclusion

Toshiyuki Kamei's contributions to polishing technology through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of polishing apparatuses, making significant strides in efficiency and effectiveness.