Company Filing History:
Years Active: 2020
Title: Toshiya Chiba: Innovator in Substrate Warpage Detection Technology
Introduction
Toshiya Chiba is a prominent inventor based in Iwate, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 2 patents, Chiba's work focuses on innovative methods for detecting and monitoring substrate warpage.
Latest Patents
Chiba's latest patents include a substrate warpage detection device and a substrate processing apparatus. The substrate warpage detection device is designed to detect warpage of a substrate loaded on a rotary table. It utilizes a light transmitting part that transmits a light beam obliquely upward, allowing for precise detection of warpage during the rotation of the rotary table. Additionally, the substrate warping monitoring device measures the surface profile of the substrate and calculates the warping amount based on reference values stored in memory.
Career Highlights
Toshiya Chiba is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing substrate processing technologies, which are critical for the production of high-quality semiconductor devices.
Collaborations
Chiba has collaborated with notable coworkers, including Junnosuke Taguchi and Yuya Sasaki. Their combined expertise has contributed to the development of innovative solutions in substrate processing.
Conclusion
Toshiya Chiba's contributions to substrate warpage detection technology highlight his role as a key innovator in the field. His patents reflect a commitment to enhancing the efficiency and accuracy of substrate processing methods.